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Nanofabrication of metal structures in gold films deposited on mica

L. A. Silva, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Volume: 11, Issue: 6, Start page: 1992

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.586532

Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSN: 0734211X
Published: 1993
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URI: https://cronfa.swan.ac.uk/Record/cronfa49557
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last_indexed 2019-03-18T20:02:11Z
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spelling 2019-03-18T14:41:00.9696705 v2 49557 2019-03-18 Nanofabrication of metal structures in gold films deposited on mica 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures 11 6 1992 0734211X 31 12 1993 1993-12-31 10.1116/1.586532 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:41:00.9696705 2019-03-18T14:41:00.7547428 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering L. A. Silva 1 Richard Palmer 0000-0001-8728-8083 2
title Nanofabrication of metal structures in gold films deposited on mica
spellingShingle Nanofabrication of metal structures in gold films deposited on mica
Richard Palmer
title_short Nanofabrication of metal structures in gold films deposited on mica
title_full Nanofabrication of metal structures in gold films deposited on mica
title_fullStr Nanofabrication of metal structures in gold films deposited on mica
title_full_unstemmed Nanofabrication of metal structures in gold films deposited on mica
title_sort Nanofabrication of metal structures in gold films deposited on mica
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 L. A. Silva
Richard Palmer
format Journal article
container_title Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures
container_volume 11
container_issue 6
container_start_page 1992
publishDate 1993
institution Swansea University
issn 0734211X
doi_str_mv 10.1116/1.586532
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1993-12-31T04:00:41Z
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score 11.013148

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