Journal article 790 views
Selective area oxide desorption by electron irradiation in a H2 ambient on GaAs (100)
S. J. Brown,
T. M. Burke,
M. P. Smith,
D. A. Ritchie,
M. Pepper,
K. B. T. Tang,
R. E. Palmer,
Richard Palmer
Applied Physics Letters, Volume: 74, Issue: 7, Pages: 950 - 952
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1063/1.123419
Abstract
Selective area oxide desorption by electron irradiation in a H2 ambient on GaAs (100)
Published in: | Applied Physics Letters |
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ISSN: | 0003-6951 1077-3118 |
Published: |
1999
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49476 |
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College: |
Faculty of Science and Engineering |
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Issue: |
7 |
Start Page: |
950 |
End Page: |
952 |