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Fullerene-based spin-on-carbon hardmask

A. Frommhold, J. Manyam, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 98, Pages: 552 - 555

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/j.mee.2012.07.019

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2012
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URI: https://cronfa.swan.ac.uk/Record/cronfa49285
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spelling 2019-03-18T14:30:33.1199741 v2 49285 2019-03-18 Fullerene-based spin-on-carbon hardmask 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Microelectronic Engineering 98 552 555 01679317 31 12 2012 2012-12-31 10.1016/j.mee.2012.07.019 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:30:33.1199741 2019-03-18T14:30:32.9052737 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A. Frommhold 1 J. Manyam 2 R.E. Palmer 3 A.P.G. Robinson 4 Richard Palmer 0000-0001-8728-8083 5
title Fullerene-based spin-on-carbon hardmask
spellingShingle Fullerene-based spin-on-carbon hardmask
Richard Palmer
title_short Fullerene-based spin-on-carbon hardmask
title_full Fullerene-based spin-on-carbon hardmask
title_fullStr Fullerene-based spin-on-carbon hardmask
title_full_unstemmed Fullerene-based spin-on-carbon hardmask
title_sort Fullerene-based spin-on-carbon hardmask
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 A. Frommhold
J. Manyam
R.E. Palmer
A.P.G. Robinson
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 98
container_start_page 552
publishDate 2012
institution Swansea University
issn 01679317
doi_str_mv 10.1016/j.mee.2012.07.019
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2012-12-31T07:47:21Z
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