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Silicon-on-Insulator Microfluidic Device With Monolithic Sensor Integration for<tex>$murm TAS$</tex>Applications
Journal of Microelectromechanical Systems, Volume: 15, Issue: 2, Pages: 308 - 313
Swansea University Author: Sanjiv Sharma
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DOI (Published version): 10.1109/JMEMS.2006.872222
Abstract
Silicon-on-Insulator Microfluidic Device With Monolithic Sensor Integration for<tex>$murm TAS$</tex>Applications
Published in: | Journal of Microelectromechanical Systems |
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ISSN: | 1057-7157 |
Published: |
2006
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa36452 |
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College: |
Faculty of Science and Engineering |
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Issue: |
2 |
Start Page: |
308 |
End Page: |
313 |