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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
A. Pérez-Tomás,
M. Lodzinski,
O. J. Guy,
M. R. Jennings,
M. Placidi,
J. Llobet,
P. M. Gammon,
M. C. Davis,
J. A. Covington,
S. E. Burrows,
P. A. Mawby,
Owen Guy
Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510
Swansea University Author: Owen Guy
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DOI (Published version): 10.1063/1.3099018
Abstract
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
Published in: | Applied Physics Letters |
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Published: |
2009
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URI: | https://cronfa.swan.ac.uk/Record/cronfa19748 |
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2014-12-12T15:11:23.2586598 v2 19748 2014-12-12 Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC c7fa5949b8528e048c5b978005f66794 0000-0002-6449-4033 Owen Guy Owen Guy true false 2014-12-12 CHEM Journal Article Applied Physics Letters 94 10 103510 31 12 2009 2009-12-31 10.1063/1.3099018 COLLEGE NANME Chemistry COLLEGE CODE CHEM Swansea University 2014-12-12T15:11:23.2586598 2014-12-12T15:11:23.2586598 Faculty of Science and Engineering School of Engineering and Applied Sciences - Chemistry A. Pérez-Tomás 1 M. Lodzinski 2 O. J. Guy 3 M. R. Jennings 4 M. Placidi 5 J. Llobet 6 P. M. Gammon 7 M. C. Davis 8 J. A. Covington 9 S. E. Burrows 10 P. A. Mawby 11 Owen Guy 0000-0002-6449-4033 12 |
title |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
spellingShingle |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC Owen Guy |
title_short |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
title_full |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
title_fullStr |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
title_full_unstemmed |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
title_sort |
Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC |
author_id_str_mv |
c7fa5949b8528e048c5b978005f66794 |
author_id_fullname_str_mv |
c7fa5949b8528e048c5b978005f66794_***_Owen Guy |
author |
Owen Guy |
author2 |
A. Pérez-Tomás M. Lodzinski O. J. Guy M. R. Jennings M. Placidi J. Llobet P. M. Gammon M. C. Davis J. A. Covington S. E. Burrows P. A. Mawby Owen Guy |
format |
Journal article |
container_title |
Applied Physics Letters |
container_volume |
94 |
container_issue |
10 |
container_start_page |
103510 |
publishDate |
2009 |
institution |
Swansea University |
doi_str_mv |
10.1063/1.3099018 |
college_str |
Faculty of Science and Engineering |
hierarchytype |
|
hierarchy_top_id |
facultyofscienceandengineering |
hierarchy_top_title |
Faculty of Science and Engineering |
hierarchy_parent_id |
facultyofscienceandengineering |
hierarchy_parent_title |
Faculty of Science and Engineering |
department_str |
School of Engineering and Applied Sciences - Chemistry{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Chemistry |
document_store_str |
0 |
active_str |
0 |
published_date |
2009-12-31T03:23:15Z |
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1763750755130408960 |
score |
11.037581 |