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Creating room temperature Ohmic contacts to 4H-SiC: studied by specific contact resistance measurements and X-ray photoelectron spectroscopy

O.J Guy, G Pope, I Blackwood, K.S Teng, L Chen, W.Y Lee, S.P Wilks, P.A Mawby, Owen Guy Orcid Logo, Vincent Teng Orcid Logo

Pages: 253 - 263

Swansea University Authors: Owen Guy Orcid Logo, Vincent Teng Orcid Logo

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DOI (Published version): 10.1016/j.susc.2004.09.035

Published: 2004
URI: https://cronfa.swan.ac.uk/Record/cronfa1842
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College: Faculty of Science and Engineering
Start Page: 253
End Page: 263